 |
|
|
| HOME > Main Products > Spin Coater |
 |
| |
 |
| Substrater Size |
Piece ~ 4 inch wafer |
| Chuck rotation speed |
300 ~ 7000 rpm |
| Spin State |
2 Steps control |
| Time |
1 ~ 999 sec, variable |
| Bowl Size |
8 inch, AI, SUS, Teflon, PP, etc |
| Vacuum chuck |
anodized AI, Acetal, Teflon, etc |
| Electrical Power |
220V, 5A |
| Oilless Vac & pressure Pump |
-650 mmHg |
| Dimension(mm) |
230W x 340H x 260L |
|
|
| |
|
| |
|
|
|
|
