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| HOME > Main Products > Spin Coater |
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| Substrater Size |
Piece ~ 6 inch wafer |
| Chuck rotation speed |
300 ~ 7000 rpm |
| Spin State |
50 Steps , 20 Recipe
(Digital Program Type) Control |
| Time |
1 ~ 999 sec, variable |
| Bowl Size |
12 inch, AI, SUS, Teflon, PP, etc |
| Accele/deceleration rates |
Variable |
| Vacuum chuck |
anodized AI, Acetal, Teflon, etc |
| Electrical Power |
220V, 5A |
| Oilless Vac & pressure Pump |
-650 mmHg |
| Dimension(mm) |
390W x 570H x 280L |
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