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ㅣ Feature

-  Uniform coating with special bowl structure
-  Substrate size up to Max. 1000mm ×1000mm
-  Programmable process parameters wih easy to use key pad
-  DC/AC Servo motor
-  Fully auto dispenser(option)
-  Portable/Bench-top type
-  Oil-less vacuum pump : External
-  Exhaust system

ㅣ Specification        
Model
EF-40P
EF-60P
EF-80P
EF-100P
EF-200P
Substrate size
piece ~ 4" wafer
piece ~ 6" wafer
piece ~ 8" wafer
piece ~ 12" wafer
Max.1m x 1m
Spin speed 500 ~ 7,000 rpm 50 ~ 6,000 rpm 50 ~ 3,000 rpm 50 ~ 2,000 rpm
Spin time 1 ~ 999 sec.
Bowl size 7 inch 10 inch 12 inch 15 inch  
Display Digital LCD
Motor DC Motor AC Servo Motor  
Program 20 steps / 11 recipe
Power 220V , 60㎐
Dimension 280W*220H*370L㎜, 15㎏ 350W*260H*450L㎜, 25㎏ 370W*260H*460L㎜, 35㎏ 650W*400H*700L㎜, 50㎏ 주문제작
Material Steel, PE, AL Steel, PE, AL SUS, PE, AL SUS, PE, AL SUS, Steel, PE, AL
Option Manual Dispenser / Auto Dispenser / Teflon 코팅, 제작 / Bowl SUS 제작
ㅣ Glove Box 매립형 Spin Coater


-  Substrate size : piece ~ 4" wafer
-  Spin speed : 500~7,000rpm
-  Program : 20 steps / 11 recipe
-  Dimension : 280W*220H*385㎜L, 20㎏

ㅣ Spin Developer

-  Substrate size : Max. 600mm x 600mm
-  Display : Touch panel for easy operation
-  Motor : AC Servo Motor
-  Spin Speed : Max. 2,000 rpm
-  Clean Booth
-  Robot System
-  Spray System
-  Liquid Supply Tank

ㅣ 척의 종류

* 샘플사이즈에 적합한 척 제작가능